Dielectrophoretic Assembly And Integration Of Nanowire Devices With Functional CMOS Operating Circuitry

Citation: Evoy, S., DiLello, N., Deshpande, V., Narayanan, A., Liu, H., Riegelman, M., Martin, B. R., Hailer, B., Bradley, J.-C., Weiss, W., Mayer, T. S., Gogotsi, Y., Bau, H. H., Mallouk, T. E., & Raman, S. (2004). Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry. Microelectronic Engineering, 75(1), 31–42. https://doi.org/10.1016/j.mee.2003.09.010

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